hkmg process flow
由CQin著作·2013·被引用1次—Inthispaper,aprocesschallengeofintegratingDualStressLiner.(DSL)(1)-(2)intogate-lastHigh-k/MetalGate(HKMG)flowis.,ProcessflowofNSFETconsideringHKMGwithgate-lastprocess.(a)and(b)AfterfinformationbasedonSi/SiGestack,(c)-(e)...
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ThetwocommonprocessflowstopatterntheHKMGstackaregate-firstandgate-last.Thegate-firstHKMGprocessisverysensitive,asthecappingmetal ...
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